Premium
Software techniques for EELS to realize about 0.3 eV energy resolution using 300 kV FEG‐TEM
Author(s) -
Kimoto K.,
Matsui Y.
Publication year - 2002
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.2002.01083.x
Subject(s) - electron energy loss spectroscopy , energy (signal processing) , software , resolution (logic) , reproducibility , filter (signal processing) , sample (material) , scripting language , computational physics , materials science , computer science , transmission electron microscopy , physics , chemistry , nanotechnology , artificial intelligence , computer vision , chromatography , quantum mechanics , thermodynamics , programming language , operating system
Summary In this short communication we describe some software techniques for electron energy‐loss spectrum measurement. We prepared DigitalMicrograph (Gatan) scripts for multiple spectrum acquisitions, quasi‐simultaneous acquisition of low‐loss and core‐loss spectra, energy drift correction, and other operations. Narrow zero‐loss spread of 0.27 eV is demonstrated using a 300 kV field‐emission transmission electron microscope (TEM) (Hitachi, HF‐3000) and a post‐column energy filter (Gatan, GIF2002). The core‐loss spectrum is acquired with an energy resolution of 0.36 eV with high reproducibility. The present software techniques effectively achieve the intrinsic energy resolution of electron sources. Sample scripts are provided in the Appendix.