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Near‐field optical microscopy based on microfabricated probes
Author(s) -
Eckert R.,
Freyland J. M.,
Gersen H.,
Heinzelmann H.,
Schürmann G.,
Noell W.,
Staufer U.,
De Rooij N. F.
Publication year - 2001
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.2001.00880.x
Subject(s) - cantilever , materials science , resolution (logic) , transmission electron microscopy , optical microscope , optics , microscopy , fluorescence , silicon , aluminium , optoelectronics , nanotechnology , scanning electron microscope , composite material , physics , artificial intelligence , computer science
We demonstrate high resolution imaging with microfabricated, cantilevered probes, consisting of solid quartz tips on silicon levers. The tips are covered by a 60‐nm thick layer of aluminium, which appears to be closed at the apex when investigated by transmission electron microscopy. An instrument specifically built for cantilever probes was used to record images of latex bead projection patterns in transmission as well as single molecule fluorescence. All images were recorded in constant height mode and show optical resolutions down to 32 nm.