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Silicon technology‐based micro‐systems for atomic force microscopy/photon scanning tunnelling microscopy
Author(s) -
GallBorrut P.,
Belier B.,
Falgayrettes P.,
Castagne M.,
Bergaud C.,
TempleBoyer P.
Publication year - 2001
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.2001.00802.x
Subject(s) - silicon , microscopy , silicon nitride , cantilever , materials science , optics , photodetector , optoelectronics , optical microscope , photon , near field scanning optical microscope , nanotechnology , physics , scanning electron microscope , composite material
We developed silicon nitride cantilevers integrating a probe tip and a wave guide that is prolonged on the silicon holder with one or two guides. A micro‐system is bonded to a photodetector. The resulting hybrid system enables us to obtain simultaneously topographic and optical near‐field images. Examples of images obtained on a longitudinal cross‐section of an optical fibre are shown.