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Microcalorimeter energy‐dispersive spectrometry using a low voltage scanning electron microscope
Author(s) -
Wollman D. A.,
Nam S. W.,
Hilton G. C.,
Irwin K. D.,
Bergren N. F.,
Rudman D. A.,
Martinis J. M.,
Newbury D. E.
Publication year - 2000
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.2000.00705.x
Subject(s) - microanalysis , materials science , tungsten , analytical chemistry (journal) , scanning electron microscope , spectrometer , acceleration voltage , tin , mass spectrometry , nitride , electron , optics , chemistry , cathode ray , nanotechnology , physics , metallurgy , nuclear physics , organic chemistry , chromatography , layer (electronics) , composite material
We describe the current performance of the prototype microcalorimeter energy‐dispersive spectrometer (µcal EDS) developed at NIST for X‐ray microanalysis. We show that the low‐energy µcal EDS, designed for operation in the energy range 0.2–2 keV, offers significant advantages for low‐beam‐energy microanalysis. We present several examples in which the prototype µcal EDS has been used to solve problems in low‐voltage microanalysis, including the analysis of tungsten silicide (WSi 2 ), titanium nitride (TiN) and barium titanate (BaTiO 3 ) and the measurement of chemical shifts in Fe and C compounds.