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The spatial distribution and resolution of coaxial backscattered electrons in SEM, calculated by Monte Carlo simulations
Author(s) -
Jiang Jiang,
Rosenberg,
Morin
Publication year - 2000
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.2000.00686.x
Subject(s) - monte carlo method , electron , resolution (logic) , coaxial , optics , image resolution , computational physics , enhanced data rates for gsm evolution , cathode ray , materials science , beam (structure) , secondary electrons , physics , nuclear physics , mathematics , computer science , statistics , telecommunications , artificial intelligence
We simulate, within a sample, the trajectories of the backscattered electrons detected in a scanning electron microscopy with a particular detection geometry. Thus we obtain the depth and lateral distributions, according to the adjustable parameter values, of the detected electrons. Finally, the scanline profile across a chemical edge is drawn. The conditions corresponding to the best lateral resolution are established; we obtain an ultimate resolution of the same order as the beam diameter.