Premium
Compact water‐window transmission X‐ray microscopy
Author(s) -
Magnus Berglund,
L. Rymell,
M. Peuker,
Thomas Wilhein,
Hans M. Hertz
Publication year - 2000
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.2000.00675.x
Subject(s) - water window , microscopy , materials science , x ray , transmission electron microscopy , optics , window (computing) , transmission (telecommunications) , physics , nanotechnology , optoelectronics , computer science , wavelength , telecommunications , operating system
We demonstrate sub‐100 nm resolution water‐window soft X‐ray full‐field transmission microscopy with a compact system. The microscope operates at λ = 3.37 nm and is based on a 100 Hz table‐top regenerative debris‐free droplet‐target laser‐plasma X‐ray source in combination with normal‐incidence multilayer condenser optics for sample illumination. High‐spatial‐resolution imaging is performed with a 7.3% efficiency nickel zone plate and a 1024 × 1024 pixel CCD detector. Images of dry test samples are recorded with exposure times of a few minutes and show features smaller than 60 nm.