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Towards better scanning near‐field optical microscopy probes — progress and new developments
Author(s) -
Heinzelmann H.,
Freyland J. M.,
Eckert R.,
Huser TH.,
Schürmann G.,
Noell W.,
Staufer U.,
De Rooij N. F.
Publication year - 1999
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.1999.00567.x
Subject(s) - microfabrication , fabrication , materials science , nanotechnology , microscopy , optical microscope , polarization (electrochemistry) , optics , scanning probe microscopy , focused ion beam , scanning electron microscope , chemistry , physics , ion , medicine , alternative medicine , composite material , organic chemistry , pathology
Several approaches are described with the aim of producing near‐field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30–50 nm, facilitating the mass‐fabrication of apertured tip structures that can be used in a combined force/near‐field optical microscope. Finally, possible future developments are outlined.