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Fabrication and observation of a standard sample for near‐field optical microscopy
Author(s) -
Kato M.,
Kiguchi M.,
Ishibashi M.,
Heike S.
Publication year - 1999
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.1999.00561.x
Subject(s) - optical microscope , optics , sample (material) , resolution (logic) , lithography , microscopy , microscope , materials science , fabrication , near field scanning optical microscope , scanning electron microscope , optoelectronics , chemistry , physics , computer science , artificial intelligence , medicine , alternative medicine , chromatography , pathology
We fabricated a standard sample for a near‐field optical microscope using scanning probe lithography. The sample contains a wedged pattern, which allows the measurement of various sizes within one image. The optical resolution of our near‐field optical microscope has been evaluated as 40 nm, which was obtained by measuring the narrowest separable gap width of the wedged pattern. Thus a standard sample containing the wedged pattern enables clear evaluation of the resolution.