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Optical microcantilever consisting of channel waveguide for scanning near‐field optical microscopy controlled by atomic force
Author(s) -
Niwa T.,
Mitsuoka Y.,
Kato K.,
Ichihara S.,
Chiba N.,
ShinOgi M.,
Nakajima K.,
Muramatsu H.,
Sakuhara T.
Publication year - 1999
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.1999.00549.x
Subject(s) - near field scanning optical microscope , materials science , optical microscope , non contact atomic force microscopy , waveguide , optics , aperture (computer memory) , microscopy , optical force , near field optics , scanning ion conductance microscopy , optoelectronics , atomic force microscopy , conductive atomic force microscopy , scanning confocal electron microscopy , nanotechnology , optical tweezers , scanning electron microscope , physics , acoustics , composite material
We develop a novel optical microcantilever for scanning near‐field optical microscopy controlled by atomic force mode (SNOM/AFM). The optical microcantilever has the bent channel waveguide, the corner of which acts as aperture with a large tip angle. The resonance frequency of the optical microcantilever is 9 kHz, and the spring constant is estimated to be 0.59 N/m. The optical microcantilever can be operated in contact mode of SNOM/AFM and we obtain the optical resolution of about 200 nm, which is as same size as the diameter of aperture. We confirm that the throughput of optical microcantilever with an aperture of 170 nm diameter would be improved to be more than 10 −5 .