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Coaxial probes for scanning near‐field microscopy
Author(s) -
Leinhos T.,
Rudow O.,
Stopka M.,
Vollkopf A.,
Oesterschulze E.
Publication year - 1999
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.1999.00538.x
Subject(s) - coaxial , cantilever , fabrication , aperture (computer memory) , materials science , optics , microscopy , scanning probe microscopy , near field scanning optical microscope , silicon , focused ion beam , optical microscope , optoelectronics , scanning electron microscope , chemistry , acoustics , physics , electrical engineering , composite material , engineering , alternative medicine , pathology , organic chemistry , medicine , ion
This paper deals with the development of coaxial aperture tips integrated in a cantilever probe for combined scanning near‐field infrared microscopy and scanning force microscopy. A fabrication process is introduced that allows the batch fabrication of hollow metal aperture tips integrated on a silicon cantilever. To achieve the coaxial tip arrangement a metal rod is deposited inside the hollow tip using the focused ion beam technique. Theoretical calculations with a finite integration code were performed to study the transmission characteristics of coaxial tips in comparison with conventional aperture probes. In addition, the influence of the geometrical design parameters of the coaxial probe on its optical behaviour is investigated.