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Development of a high energy resolution electron energy‐loss spectroscopy microscope
Author(s) -
Masami Terauchi,
Michiyoshi Tanaka,
K. Tsuno,
M. Ishida
Publication year - 1999
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.1999.00450.x
Subject(s) - electron energy loss spectroscopy , electron microscope , spectroscopy , high resolution , materials science , energy dispersive x ray spectroscopy , high resolution electron energy loss spectroscopy , resolution (logic) , energy (signal processing) , scanning transmission electron microscopy , electron , scanning electron microscope , nanotechnology , optics , physics , transmission electron microscopy , geology , computer science , nuclear physics , remote sensing , quantum mechanics , artificial intelligence
We have developed a high energy resolution electron energy‐loss spectroscopy (EELS) microscope, which can take spectra from specified small specimen areas and specified small reciprocal space areas to investigate detailed electronic structures. The EELS microscope is equipped with retarding Wien filters as the monochromator and the analyser. The filters are designed to achieve a stigmatic focus. The energy resolutions are 12 meV and 25 meV for cases without and with a specimen, respectively. Spatial and momentum resolutions are 30–110 nm in diameter and 1.1 nm −1 in angular diameter, respectively. EELS spectra are presented to show the performance of this instrument.