Premium
A method for the location of specific points on surfaces in the SEM
Author(s) -
CRAWFORD B.
Publication year - 1996
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.1996.69349.x
Subject(s) - coordinate system , transformation (genetics) , matching (statistics) , materials science , fracture (geology) , surface (topology) , geometry , computer science , mathematics , chemistry , composite material , biochemistry , statistics , gene
A method for precisely locating points on large surfaces during SEM examination and for finding corresponding points on matching surfaces (such as those resulting from the fracture of a solid body) is described. This method also allows for the repeated examination of specific points during subsequent SEM sessions after the specimen has been removed and replaced in the SEM. The method is based on a coordinate transformation between the SEM stage coordinates and specimen coordinate systems defined by arbitrarily chosen reference points on the specimen.