Open AccessInfluence of NH3 plasma and Ti doping on pH-sensitive CeO2 electrolyte-insulator-semiconductor biosensors
Author(s) -
Chiang Kao,
ChiNing Chang,
Yu Tzu Chen,
Wei Ming Su,
Chien Cheng Lu,
ChanYu Lin,
Hsiang Chen
Publication year - 2017
Publication title -
scientific reports
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.24
H-Index - 213
ISSN - 2045-2322
DOI - 10.1038/s41598-017-02692-2
Subject(s) - doping , semiconductor , biosensor , electrolyte , insulator (electricity) , plasma , materials science , optoelectronics , nanotechnology , chemistry , electrode , physics , quantum mechanics
In this study, CeO 2 pH-sensitive sensing membranes in electrolyte-insulator-semiconductor structures on silicon substrate were fabricated. To enhance sensing performance, the membrane underwent Ti doping and NH 3 plasma treatment on the surface. To examine the effects of Ti doping and plasma treatment, multiple material properties evaluations were conducted using field-emission scanning electron microscopy, X-ray diffraction, atomic force microscopy, and secondary ion mass spectroscopy. Results indicate that Ti doping and plasma treatment can remove defects and enhance crystallization, thereby achieving improved pH-sensing performance of the membrane with high sensitivity, high linearity, low hysteresis voltage and low drift voltage. CeO 2 -based EIS membranes with Ti doping and NH 3 plasma treatment show promise for future portable pH-sensitive biosensors.