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Revised IR spectrum, radiative efficiency and global warming potential of nitrogen trifluoride
Author(s) -
Robson J. I.,
Gohar L. K.,
Hurley M. D.,
Shine K. P.,
Wallington T. J.
Publication year - 2006
Publication title -
geophysical research letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.007
H-Index - 273
eISSN - 1944-8007
pISSN - 0094-8276
DOI - 10.1029/2006gl026210
Subject(s) - radiative transfer , global warming potential , greenhouse gas , carbon dioxide , absorption (acoustics) , environmental science , nitrogen , trifluoride , industrial gas , absorption efficiency , atmospheric sciences , global warming , greenhouse effect , ozone , materials science , chemistry , meteorology , climate change , physics , optics , inorganic chemistry , thermodynamics , zoology , geology , oceanography , organic chemistry , turbine , biology , composite material
Nitrogen trifluoride (NF 3 ) is an industrial gas used in the semiconductor industry as a plasma etchant and chamber cleaning gas. NF 3 is an alternative to other potent greenhouse gases and its usage has increased markedly over the last decade. In recognition of its increased relevance and to aid planning of future usage we report an updated radiative efficiency and global warming potentials for NF 3 . Laboratory measurements give an integrated absorption cross section of 7.04 × 10 −17 cm 2 molecule −1 cm −1 over the spectral region 200–2000 cm −1 . The radiative efficiency is calculated to be 0.21 Wm −2 ppbv −1 and the 100 year GWP, relative to carbon dioxide, is 17200. These values are approximately 60% higher than previously published estimates, primarily reflecting the higher infrared absorption cross‐sections reported here.