Open AccessToF-SIMS Depth Profiling of Metal, Metal Oxide, and Alloy Multilayers in Atmospheres of H2, C2H2, CO, and O2
Author(s) -
Jernej Ekar,
P. Panjan,
Sandra Drev,
Janez Kovač
Publication year - 2021
Publication title -
journal of the american society for mass spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.961
H-Index - 127
eISSN - 1879-1123
pISSN - 1044-0305
DOI - 10.1021/jasms.1c00218
Subject(s) - sputtering , chemistry , analytical chemistry (journal) , metal , oxide , secondary ion mass spectrometry , alloy , ion , materials science , thin film , nanotechnology , organic chemistry , chromatography
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