Open AccessMiniaturized CO2 Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector
Author(s) -
Doris K. T. Ng,
Linfang Xu,
Weiguo Chen,
Huanhuan Wang,
Zhonghua Gu,
X. X. Chia,
Yuan Hsing Fu,
Norhanani Jaafar,
Chong Pei Ho,
TanTan Zhang,
Qingxin Zhang,
Len Y. T. Lee
Publication year - 2022
Publication title -
acs sensors
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 2.055
H-Index - 57
ISSN - 2379-3694
DOI - 10.1021/acssensors.2c00980
Subject(s) - pyroelectricity , detector , optoelectronics , materials science , absorption (acoustics) , wafer , stack (abstract data type) , gas detector , analytical chemistry (journal) , optics , chemistry , physics , chromatography , computer science , dielectric , composite material , ferroelectricity , programming language
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