Open AccessRoom-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems
Author(s) -
Daniel NavarroUrrios,
Martín F. Colombano,
Guillermo Arregui,
Guilhem Madiot,
Alessandro Pitanti,
Amadeu Griol,
T. Makkonen,
Jouni Ahopelto,
C. M. Sotomayor Torres,
Alejandro Martı́nez
Publication year - 2022
Publication title -
acs photonics
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 2.735
H-Index - 89
ISSN - 2330-4022
DOI - 10.1021/acsphotonics.1c01614
Subject(s) - materials science , microelectromechanical systems , optoelectronics , photonics , silicon , cmos , electronics , silicon photonics , transducer , fabrication , mechanical system , piezoresistive effect , integrated circuit , nanotechnology , electrical engineering , engineering , mechanical engineering , medicine , alternative medicine , pathology
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