Open AccessDeep Etching of Silicon Based on Metal-Assisted Chemical Etching
Author(s) -
Anafi Nur’aini,
Ilwhan Oh
Publication year - 2022
Publication title -
acs omega
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.779
H-Index - 40
ISSN - 2470-1343
DOI - 10.1021/acsomega.2c01113
Subject(s) - etching (microfabrication) , materials science , microelectromechanical systems , nanometre , isotropic etching , dry etching , nanotechnology , silicon , micrometer , metal , optoelectronics , composite material , metallurgy , optics , layer (electronics) , physics
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