Open AccessCoupling Supramolecular Assemblies and Reactive Oxygen Species (ROS) with Megasonic Action for Applications in Shallow Trench Isolation (STI) Post-Chemical Mechanical Planarization (p-CMP) Cleaning
Author(s) -
Katherine M. Wortman-Otto,
Don Watson,
Don Dussault,
Jason J. Keleher
Publication year - 2022
Publication title -
acs omega
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.779
H-Index - 40
ISSN - 2470-1343
DOI - 10.1021/acsomega.2c00683
Subject(s) - chemical mechanical planarization , shallow trench isolation , nanotechnology , materials science , chemistry , silicone , cleaning agent , slurry , chemical engineering , trench , composite material , layer (electronics) , organic chemistry , engineering
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