Open AccessTemperature Dependence of Ultrathin Mixed-Phase Ga2O3 Films Grown on the α-Al2O3 Substrate via Mist-CVD
Author(s) -
Abhay Kumar Mondal,
Loh Kean Ping,
Muhammad Aniq Shazni Mohammad Haniff,
Mohd Arif Mohd Sarjidan,
Boon Tong Goh,
Mohd Ambri Mohamed
Publication year - 2022
Publication title -
acs omega
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.779
H-Index - 40
ISSN - 2470-1343
DOI - 10.1021/acsomega.1c05859
Subject(s) - materials science , band gap , chemical vapor deposition , semiconductor , substrate (aquarium) , thin film , gallium , optoelectronics , mist , nanotechnology , metallurgy , oceanography , physics , meteorology , geology
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