Open AccessMapping Oxidation and Wafer Cleaning to Device Characteristics Using Physics-Assisted Machine Learning
Author(s) -
Sparsh Pratik,
Po-Ning Liu,
Jun Ota,
Yen-Liang Tu,
Guan-Wen Lai,
Ya-Wen Ho,
Zheng-Kai Yang,
Tejender Singh Rawat,
Albert Lin
Publication year - 2022
Publication title -
acs omega
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.779
H-Index - 40
ISSN - 2470-1343
DOI - 10.1021/acsomega.1c05552
Subject(s) - machine learning , artificial intelligence , computer science , multi task learning , process (computing) , wafer , perceptron , artificial neural network , task (project management) , electrical engineering , engineering , systems engineering , operating system