Open AccessEnhanced Conductivity and Microstructure in Highly Textured TiN1–x/c-Al2O3 Thin Films
Author(s) -
Alexander Zintler,
Robert Eilhardt,
Stefan Petzold,
S. U. Sharath,
Enrico Bruder,
Nico Kaiser,
Lambert Alff,
Leopoldo MolinaLuna
Publication year - 2022
Publication title -
acs omega
Language(s) - English
Resource type - Journals
ISSN - 2470-1343
DOI - 10.1021/acsomega.1c05505
Subject(s) - materials science , grain boundary , tin , thin film , lattice constant , sapphire , electrical resistivity and conductivity , microstructure , nitride , analytical chemistry (journal) , condensed matter physics , metallurgy , composite material , nanotechnology , optics , layer (electronics) , diffraction , chemistry , electrical engineering , laser , physics , engineering , chromatography
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