Open AccessSub-25 nm Inorganic and Dielectric Nanopattern Arrays on Substrates: A Block Copolymer-Assisted Lithography
Author(s) -
Tandra Ghoshal,
Nadezda Prochukhan,
Michael A. Morris
Publication year - 2021
Publication title -
acs omega
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.779
H-Index - 40
ISSN - 2470-1343
DOI - 10.1021/acsomega.1c05124
Subject(s) - materials science , copolymer , dielectric , nanoparticle , x ray photoelectron spectroscopy , annealing (glass) , nanowire , nanotechnology , chemical engineering , oxide , polymer , optoelectronics , composite material , engineering , metallurgy
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