Thickness-Dependent Structural and Electrical Properties of WS2 Nanosheets Obtained via the ALD-Grown WO3 Sulfurization Technique as a Channel Material for Field-Effect Transistors | Zendy

Р. И. Романов | Zendy; Maxim G. Kozodaev | Zendy; Аnna G. Chernikova | Zendy; Ivan V. Zabrosaev | Zendy; Anastasia Chouprik | Zendy; Sergei Zarubin | Zendy; Sergey M. Novikov | Zendy; Valentyn S. Volkov | Zendy; Andrey M. Markeev | Zendy

Open Access

Thickness-Dependent Structural and Electrical Properties of WS₂ Nanosheets Obtained via the ALD-Grown WO₃ Sulfurization Technique as a Channel Material for Field-Effect Transistors

Author(s) -

Р. И. Романов,

Maxim G. Kozodaev,

Аnna G. Chernikova,

Ivan V. Zabrosaev,

Anastasia Chouprik,

Sergei Zarubin,

Sergey M. Novikov,

Valentyn S. Volkov,

Andrey M. Markeev

Publication year - 2021

Publication title -

acs omega

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.779

H-Index - 40

ISSN - 2470-1343

DOI - 10.1021/acsomega.1c04532

Subject(s) - materials science , amorphous solid , phase (matter) , atomic layer deposition , transmission electron microscopy , monolayer , optoelectronics , electrical resistivity and conductivity , chemical engineering , grain size , layer (electronics) , nanotechnology , analytical chemistry (journal) , composite material , crystallography , chemistry , electrical engineering , organic chemistry , engineering , chromatography

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