Open AccessNanofabrication via Maskless Localized Atomic Layer Deposition of Patterned Nanoscale Metal Oxide Films
Author(s) -
Laabdia Midani,
Waël Ben-Yahia,
Vincent Salles,
Catherine Marichy
Publication year - 2021
Publication title -
acs applied nano materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.227
H-Index - 29
ISSN - 2574-0970
DOI - 10.1021/acsanm.1c02550
Subject(s) - materials science , layer (electronics) , atomic layer deposition , nanolithography , nanoscopic scale , nanotechnology , deposition (geology) , oxide , nanometre , stacking , optoelectronics , nanostructure , metal , thin film , composite material , fabrication , chemistry , metallurgy , medicine , paleontology , alternative medicine , organic chemistry , pathology , sediment , biology
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