Focused Electron Beam-Induced Deposition and Post-Growth Purification Using the Heteroleptic Ru Complex (η3-C3H5)Ru(CO)3Br | Zendy

Jakub Jurczyk | Zendy; Christopher R. Brewer | Zendy; Olivia M. Hawkins | Zendy; Mikhail N. Polyakov | Zendy; Cz. Kapusta | Zendy; Lisa McElweeWhite | Zendy; Ivo Utke | Zendy

Open Access

Focused Electron Beam-Induced Deposition and Post-Growth Purification Using the Heteroleptic Ru Complex (η³-C₃H₅)Ru(CO)₃Br

Author(s) -

Jakub Jurczyk,

Christopher R. Brewer,

Olivia M. Hawkins,

Mikhail N. Polyakov,

Cz. Kapusta,

Lisa McElweeWhite,

Ivo Utke

Publication year - 2019

Publication title -

acs applied materials and interfaces

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 2.535

H-Index - 228

eISSN - 1944-8252

pISSN - 1944-8244

DOI - 10.1021/acsami.9b07634

Subject(s) - annealing (glass) , materials science , deposition (geology) , bromide , transmission electron microscopy , electron beam processing , bromine , phase (matter) , analytical chemistry (journal) , oxygen , nanocrystal , irradiation , crystallography , inorganic chemistry , chemistry , nanotechnology , organic chemistry , metallurgy , paleontology , physics , sediment , nuclear physics , biology

Focused electron beam-induced deposition using the heteroleptic complex (η 3 -C 3 H 5 )Ru(CO) 3 Br as a precursor resulted in deposition of material with Ru content of 23 at. %. Transmission electron microscopy images indicated a nanogranular structure of pure Ru nanocrystals, embedded into a matrix containing carbon, oxygen, and bromine. The deposits were purified by annealing in a reactive 98% N 2 /2% H 2 atmosphere at 300 °C, resulting in a reduction of contaminants and an increase of the Ru content to 83 at. %. Although a significant volume loss of 79% was found, the shrinkage was observed mostly for vertical thickness (around 75%). The lateral dimensions decreased much less significantly (around 9%). Deposition results, in conjunction with previous gas-phase and condensed-phase surface studies on the electron-induced reactions of (η 3 -C 3 H 5 )Ru(CO) 3 Br, provide insights into the behavior of allyl, carbonyl, and bromide ligands under identical electron beam irradiation.

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