Top-down Approach for the Direct Synthesis, Patterning, and Operation of Artificial Micromuscles on Flexible Substrates | Zendy

Ali Maziz | Zendy; Cédric Plesse | Zendy; Caroline Soyer | Zendy; Éric Cattan | Zendy; Frédéric Vidal | Zendy

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Top-down Approach for the Direct Synthesis, Patterning, and Operation of Artificial Micromuscles on Flexible Substrates

Author(s) -

Ali Maziz,

Cédric Plesse,

Caroline Soyer,

Éric Cattan,

Frédéric Vidal

Publication year - 2015

Publication title -

acs applied materials and interfaces

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 2.535

H-Index - 228

eISSN - 1944-8252

pISSN - 1944-8244

DOI - 10.1021/acsami.5b09577

Subject(s) - materials science , artificial muscle , actuator , nanotechnology , polymer , layer (electronics) , microsystem , stacking , polymerization , electrode , electrolyte , bending , voltage , composite material , electrical engineering , chemistry , physics , nuclear magnetic resonance , engineering

Recent progress in the field of microsystems on flexible substrates raises the need for alternatives to the stiffness of classical actuation technologies. This paper reports a top-down process to microfabricate soft conducting polymer actuators on substrates on which they ultimately operate. The bending microactuators were fabricated by sequentially stacking layers using a layer polymerization by layer polymerization of conducting polymer electrodes and a solid polymer electrolyte. Standalone microbeams thinner than 10 μm were fabricated on SU-8 substrates associated with a bottom gold electrical contact. The operation of microactuators was demonstrated in air and at low voltage (±4 V).

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