Open AccessSensitive Transfer-Free Wafer-Scale Graphene Microphones
Author(s) -
Roberto Pezone,
Gabriele Baglioni,
P.M. Sarro,
Peter G. Steeneken,
Sten Vollebregt
Publication year - 2022
Publication title -
acs applied materials and interfaces
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 2.535
H-Index - 228
eISSN - 1944-8252
pISSN - 1944-8244
DOI - 10.1021/acsami.2c03305
Subject(s) - materials science , graphene , wafer , miniaturization , surface micromachining , microelectromechanical systems , optoelectronics , membrane , silicon , nanotechnology , etching (microfabrication) , fabrication , nanometre , layer (electronics) , composite material , medicine , alternative medicine , pathology , biology , genetics
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