Open AccessImproved Electrostatics through Digital Etch Schemes in Vertical GaSb Nanowire p-MOSFETs on Si
Author(s) -
Zhongyunshen Zhu,
Adam Jönsson,
Yen-Po Liu,
Johannes Svensson,
Rainer Timm,
Lars–Erik Wernersson
Publication year - 2022
Publication title -
acs applied electronic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.379
H-Index - 4
ISSN - 2637-6113
DOI - 10.1021/acsaelm.1c01134
Subject(s) - nanowire , materials science , optoelectronics , cmos , wafer , etching (microfabrication) , gate dielectric , transistor , mosfet , semiconductor , x ray photoelectron spectroscopy , nanotechnology , electrical engineering , layer (electronics) , chemical engineering , voltage , engineering