Open AccessEffect of Subcycle Arrangement on Direct Epitaxy in ALD of LaNiO3
Author(s) -
Henrik H. Sønsteby,
Erik Skaar,
Helmer Fjellvåg,
Ola Nilsen
Publication year - 2020
Publication title -
acs applied electronic materials
Language(s) - English
Resource type - Journals
ISSN - 2637-6113
DOI - 10.1021/acsaelm.0c00855
Subject(s) - atomic layer deposition , materials science , electronics , amorphous solid , crystallinity , nanotechnology , deposition (geology) , thin film , chemistry , crystallography , composite material , paleontology , sediment , biology
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