Open AccessMechanistic Study of Nucleation Enhancement in Atomic Layer Deposition by Pretreatment with Small Organometallic Molecules
Author(s) -
Camila de Paula,
Nathaniel E. Richey,
Li Zeng,
Stacey F. Bent
Publication year - 2019
Publication title -
chemistry of materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.741
H-Index - 375
eISSN - 1520-5002
pISSN - 0897-4756
DOI - 10.1021/acs.chemmater.9b03826
Subject(s) - chemisorption , nucleation , grazing incidence small angle scattering , atomic layer deposition , chemical engineering , chemistry , oxide , materials science , nanotechnology , inorganic chemistry , layer (electronics) , scattering , adsorption , organic chemistry , small angle neutron scattering , physics , neutron scattering , engineering , optics
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