Open AccessMolecular Layer Etching of Metalcone Films Using Lithium Organic Salts and Trimethylaluminum
Author(s) -
Matthias J. Young,
Devika Choudhury,
Steven Letourneau,
Anil U. Mane,
Angel YanguasGil,
Jeffrey W. Elam
Publication year - 2020
Publication title -
chemistry of materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.741
H-Index - 375
eISSN - 1520-5002
pISSN - 0897-4756
DOI - 10.1021/acs.chemmater.9b03627
Subject(s) - etching (microfabrication) , quartz crystal microbalance , materials science , layer (electronics) , reactive ion etching , wafer , nanotechnology , thin film , dry etching , atomic layer deposition , layer by layer , chemical engineering , chemistry , adsorption , organic chemistry , engineering
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom