Elucidating the Evolving Atomic Structure in Atomic Layer Deposition Reactions with in Situ XANES and Machine Learning | Zendy

Orlando Trejo | Zendy; Anup L. Dadlani | Zendy; Francisco De La Paz | Zendy; Shinjita Acharya | Zendy; Rob Kravec | Zendy; Dennis Nordlund | Zendy; Ritimukta Sarangi | Zendy; Fritz B. Prinz | Zendy; Jan Torgersen | Zendy; Neil P. Dasgupta | Zendy

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Elucidating the Evolving Atomic Structure in Atomic Layer Deposition Reactions with in Situ XANES and Machine Learning

Author(s) -

Orlando Trejo,

Anup L. Dadlani,

Francisco De La Paz,

Shinjita Acharya,

Rob Kravec,

Dennis Nordlund,

Ritimukta Sarangi,

Fritz B. Prinz,

Jan Torgersen,

Neil P. Dasgupta

Publication year - 2019

Publication title -

chemistry of materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 3.741

H-Index - 375

eISSN - 1520-5002

pISSN - 0897-4756

DOI - 10.1021/acs.chemmater.9b03025

Subject(s) - xanes , atomic layer deposition , nucleation , thin film , atomic units , materials science , in situ , deposition (geology) , nanoparticle , nanotechnology , characterization (materials science) , layer (electronics) , absorption (acoustics) , synchrotron , phase (matter) , spectral line , chemistry , optics , physics , paleontology , organic chemistry , quantum mechanics , astronomy , sediment , composite material , biology

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