Open AccessAtomic Layer Deposition of Aluminum Sulfide: Growth Mechanism and Electrochemical Evaluation in Lithium-Ion Batteries
Author(s) -
Xiangbo Meng,
Yanqiang Cao,
Joseph A. Libera,
Jeffrey W. Elam
Publication year - 2017
Publication title -
chemistry of materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.741
H-Index - 375
eISSN - 1520-5002
pISSN - 0897-4756
DOI - 10.1021/acs.chemmater.7b02175
Subject(s) - atomic layer deposition , quartz crystal microbalance , materials science , lithium (medication) , crystallinity , analytical chemistry (journal) , amorphous solid , chemical engineering , fourier transform infrared spectroscopy , thin film , inorganic chemistry , chemistry , nanotechnology , composite material , crystallography , medicine , adsorption , chromatography , endocrinology , engineering
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