Open AccessPyroelectric Heat Detection for Calibrated Measurement of Atomic Layer Deposition Reaction Heat
Author(s) -
Ashley R. Bielinski,
Emily A. SpragueKlein,
Brian T. Phelan,
Alex B. F. Martinson
Publication year - 2021
Publication title -
chemistry of materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 3.741
H-Index - 375
eISSN - 1520-5002
pISSN - 0897-4756
DOI - 10.1021/acs.chemmater.1c01745
Subject(s) - atomic layer deposition , calorimeter (particle physics) , deposition (geology) , calorimetry , reaction calorimeter , work (physics) , heat generation , chemistry , thermal , detector , materials science , nanotechnology , thermodynamics , layer (electronics) , optics , physics , paleontology , sediment , biology
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