Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion | Zendy

Fabio Grillo | Zendy; Job Soethoudt | Zendy; Esteban A. Marques | Zendy; Lilian de Martín | Zendy; Kaat Van Dongen | Zendy; J. Ruud van Ommen | Zendy; Annelies Delabie | Zendy

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Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion

Author(s) -

Fabio Grillo,

Job Soethoudt,

Esteban A. Marques,

Lilian de Martín,

Kaat Van Dongen,

J. Ruud van Ommen,

Annelies Delabie

Publication year - 2020

Publication title -

chemistry of materials

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 3.741

H-Index - 375

eISSN - 1520-5002

pISSN - 0897-4756

DOI - 10.1021/acs.chemmater.0c02588

Subject(s) - surface diffusion , kinetic monte carlo , diffusion , deposition (geology) , adsorption , chemical vapor deposition , nanoparticle , nanotechnology , chemical engineering , tin , materials science , thermal diffusivity , catalysis , microelectronics , atomic layer deposition , chemical physics , chemistry , thin film , monte carlo method , organic chemistry , paleontology , physics , engineering , sediment , thermodynamics , statistics , mathematics , quantum mechanics , biology , metallurgy

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