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Low-voltage scanning electron microscopy
Author(s) -
J. B. Pawley,
M. P. Winters
Publication year - 1983
Publication title -
proceedings annual meeting electron microscopy society of america
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2690-1315
pISSN - 0424-8201
DOI - 10.1017/s0424820100076160
Subject(s) - scanning electron microscope , semiconductor , secondary electrons , voltage , cathode ray , electron beam induced current , resolution (logic) , electron , semiconductor device , materials science , signal (programming language) , beam (structure) , acceleration voltage , optics , image resolution , work (physics) , nanotechnology , optoelectronics , electrical engineering , computer science , physics , engineering , mechanical engineering , artificial intelligence , layer (electronics) , quantum mechanics , programming language

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