Open AccessNonlinear phase error analysis of equivalent thickness in a white-light spectral interferometer
Author(s) -
Tong Guo,
Qianwen Weng,
Bei Luo,
Jinping Chen,
Xing Fu,
Xiaotang Hu
Publication year - 2019
Publication title -
nami jishu yu jingmi gongcheng/nanotechnology and precision engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.232
H-Index - 12
eISSN - 2589-5540
pISSN - 1672-6030
DOI - 10.1016/j.npe.2019.07.003
Subject(s) - optics , materials science , beam splitter , interferometry , white light interferometry , optical path length , thin film , beam (structure) , phase (matter) , wavelength , lens (geology) , nonlinear system , optoelectronics , physics , laser , quantum mechanics , nanotechnology