Open AccessResearch on the process of fabricating a multi-layer metal micro-structure based on UV-LIGA overlay technology
Author(s) -
Yue Ma,
Wenkai Liu,
Chong Liu
Publication year - 2019
Publication title -
nami jishu yu jingmi gongcheng/nanotechnology and precision engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.232
H-Index - 12
eISSN - 2589-5540
pISSN - 1672-6030
DOI - 10.1016/j.npe.2019.07.002
Subject(s) - electroforming , liga , materials science , photoresist , fabrication , layer (electronics) , resist , substrate (aquarium) , optoelectronics , lithography , nanotechnology , medicine , alternative medicine , pathology , oceanography , geology