Open AccessAnodic oxidation effects at the copper/silicon oxide interface
Author(s) -
Stefan Tappertzhofen,
R. Ahlmann
Publication year - 2022
Publication title -
memories, materials, devices, circuits and systems
Language(s) - English
Resource type - Journals
ISSN - 2773-0646
DOI - 10.1016/j.memori.2022.100004
Subject(s) - x ray photoelectron spectroscopy , cyclic voltammetry , copper , redox , anode , electrochemistry , materials science , oxide , layer (electronics) , electrode , silicon , inorganic chemistry , oxygen , chemical engineering , ion , copper oxide , anodic oxidation , chemistry , nanotechnology , metallurgy , organic chemistry , engineering