Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition | Zendy

Yingfeng He | Zendy; Meiling Li | Zendy; Sanjie Liu | Zendy; Huiyun Wei | Zendy; Huanyu Ye | Zendy; Yimeng Song | Zendy; Peng Qiu | Zendy; Yunlai An | Zendy; Mingzeng Peng | Zendy; Xinhe Zheng | Zendy

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Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition

Author(s) -

Yingfeng He,

Meiling Li,

Sanjie Liu,

Huiyun Wei,

Huanyu Ye,

Yimeng Song,

Peng Qiu,

Yunlai An,

Mingzeng Peng,

Xinhe Zheng

Publication year - 2019

Publication title -

acta metallurgica sinica (english letters)

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.594

H-Index - 33

eISSN - 2194-1289

pISSN - 1006-7191

DOI - 10.1007/s40195-019-00938-8

Subject(s) - materials science , graphene , wurtzite crystal structure , triethylgallium , raman spectroscopy , photoluminescence , gallium nitride , thin film , x ray photoelectron spectroscopy , optoelectronics , substrate (aquarium) , chemical vapor deposition , analytical chemistry (journal) , layer (electronics) , nanotechnology , chemical engineering , metalorganic vapour phase epitaxy , epitaxy , optics , metallurgy , zinc , oceanography , physics , engineering , chemistry , chromatography , geology

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