Power-dependent physical properties of $$\mathbf{GaN}$$ thin films deposited on sapphire substrates by RF magnetron sputtering
Author(s) -
Asim Mantarcı,
Mutlu Kundakçı
Publication year - 2019
Publication title -
bulletin of materials science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.35
H-Index - 72
eISSN - 0973-7669
pISSN - 0250-4707
DOI - 10.1007/s12034-019-1883-4
Subject(s) - materials science , thin film , sapphire , optoelectronics , gallium nitride , high power impulse magnetron sputtering , crystallite , sputter deposition , band gap , sputtering , optics , laser , nanotechnology , layer (electronics) , physics , metallurgy
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