Open AccessReview of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition
Author(s) -
Ashwanth Subramanian,
Nikhil Tiwale,
ChangYong Nam
Publication year - 2018
Publication title -
jom
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.67
H-Index - 107
eISSN - 1543-1851
pISSN - 1047-4838
DOI - 10.1007/s11837-018-3141-4
Subject(s) - microelectronics , materials science , atomic layer deposition , nanotechnology , nanocomposite , chemical vapor deposition , polymer , layer (electronics) , infiltration (hvac) , composite material
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom