Open AccessIsolating GaSb Membranes Grown Metamorphically on GaAs Substrates Using Highly Selective Substrate Removal Etch Processes
Author(s) -
Emma J. Renteria,
Ayşe J. Muñiz,
Sadhvikas Addamane,
Darryl M. Shima,
C.P. Hains,
Ganesh Balakrishnan
Publication year - 2015
Publication title -
journal of electronic materials
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.422
H-Index - 99
eISSN - 1543-186X
pISSN - 0361-5235
DOI - 10.1007/s11664-015-3625-8
Subject(s) - etch pit density , substrate (aquarium) , materials science , membrane , optoelectronics , etching (microfabrication) , semiconductor materials , chemistry , semiconductor , nanotechnology , biology , layer (electronics) , ecology , biochemistry
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom