Open AccessStress Monitoring of Post-processed MEMS Silicon Microbridge Structures Using Raman Spectroscopy
Author(s) -
LaVern A. Starman,
Ronald A. Coutu
Publication year - 2012
Publication title -
experimental mechanics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.815
H-Index - 87
eISSN - 1741-2765
pISSN - 0014-4851
DOI - 10.1007/s11340-011-9586-9
Subject(s) - residual stress , materials science , microelectromechanical systems , raman spectroscopy , stress (linguistics) , silicon , composite material , optoelectronics , optics , linguistics , philosophy , physics
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