Open AccessMultilayered microstructures with shape memory effects for vertical deployment
Author(s) -
Zhongjing Ren,
Jianping Yuan,
Xiaoyu Su,
Yang Xu,
R. S. Bauer,
Sundeep Mangla,
Ming Lu,
Yong Shi
Publication year - 2020
Publication title -
microsystem technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.386
H-Index - 63
eISSN - 1432-1858
pISSN - 0946-7076
DOI - 10.1007/s00542-020-05101-3
Subject(s) - materials science , microstructure , shape memory alloy , annealing (glass) , austenite , composite material , scanning electron microscope , nickel titanium , sputtering , focused ion beam , fabrication , optics , thin film , nanotechnology , ion , quantum mechanics , medicine , pathology , physics , alternative medicine
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