Open AccessHigh aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing
Author(s) -
Mai Trang,
Qinggele Li,
Thi Thanh Ngan Nguyen,
H. Benisty,
Isabelle LedouxRak,
Ngoc Diep Lai
Publication year - 2014
Publication title -
microsystem technologies
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.386
H-Index - 63
eISSN - 1432-1858
pISSN - 0946-7076
DOI - 10.1007/s00542-014-2096-9
Subject(s) - photoresist , laser , materials science , absorption (acoustics) , simple (philosophy) , aspect ratio (aeronautics) , optoelectronics , photon , optics , two photon absorption , nanotechnology , physics , composite material , philosophy , epistemology , layer (electronics)
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