Open AccessFerroelectric thin film fabrication by direct UV-lithography
Author(s) -
Manuel Benkler,
F. Paul,
Jennifer A. Schott,
Thomas Hanemann
Publication year - 2013
Publication title -
microsystem technologies
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.386
H-Index - 63
eISSN - 1432-1858
pISSN - 0946-7076
DOI - 10.1007/s00542-013-1963-0
Subject(s) - materials science , fabrication , ferroelectricity , thin film , photolithography , annealing (glass) , sol gel , lithography , spin coating , nanotechnology , optoelectronics , composite material , medicine , alternative medicine , pathology , dielectric
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