Open AccessUltra high aspect-ratio MEMS and NEMS on basis of fibrous composite technology
Author(s) -
Sergey Sukhoveyev
Publication year - 2008
Publication title -
microsystem technologies
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.386
H-Index - 63
eISSN - 1432-1858
pISSN - 0946-7076
DOI - 10.1007/s00542-007-0519-6
Subject(s) - nanoelectromechanical systems , microelectronics , microelectromechanical systems , fabrication , actuator , materials science , nanotechnology , planar , mechanical engineering , computer science , electrical engineering , engineering , nanomedicine , nanoparticle , medicine , alternative medicine , computer graphics (images) , pathology