Open AccessCharacterization of thin films using heavy ion beams
Author(s) -
H. Timmers,
R. G. Elliman,
T.R. Ophel
Publication year - 1999
Publication title -
bulletin of materials science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.35
H-Index - 72
eISSN - 0973-7669
pISSN - 0250-4707
DOI - 10.1007/bf02749974
Subject(s) - elastic recoil detection , materials science , ion beam analysis , thin film , characterization (materials science) , ion beam , ion , projectile , ionization , beam (structure) , resolution (logic) , analytical chemistry (journal) , optics , nanotechnology , physics , chemistry , chromatography , quantum mechanics , artificial intelligence , computer science , metallurgy
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